Influence of zirconium addition on microstructure, hardness and oxidation resistance of tantalum nitride thin films
نویسندگان
چکیده
Ta1-xZrxN thin films were deposited by reactive magnetron sputtering aiming to investigate the influence of zirconium addition on microstructure, hardness and high temperature oxidation resistance coatings. GAXRD showed that all maintained ZrN crystalline structure, forming a TaZrN solid solution. Zr incorporation did not alter values coatings, however, promoted significant improvements in when compared pure TaN films.
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
15 صفحه اولHigh temperature thermal properties of thin tantalum nitride films
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ژورنال
عنوان ژورنال: Materia-rio De Janeiro
سال: 2021
ISSN: ['1517-7076']
DOI: https://doi.org/10.1590/s1517-707620210004.1311